Klappentext

Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro-properties, ferroelectric films, LED research, and materials for memory applications and other thin film applications.
Of particular note in this new edition is the coverage of 'reduction to practice,' a phase where the idea for a technology transition from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films towards practical applications. The book also discusses the latest applications of various thin film deposition technologies.
Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists, engineers, and managers working in academia or semiconductor related R&D.